Electron Beam Lithography Systems

Over 40 years of accumulation of nanotechnology know-how
Since the foundation of the company in 1975 we have made substantial contributions to the fields of fine patterning, measurement,and analysis, thereby driving advances in precision technology.
Elionix Engineering is an expert partner to the global nanofabrication and SEM imaging for the Research & Development of various innovativation. From the conventional Si based device to other material based devices,we have been working in partnership with companies all over the world for more than 40 years. Unique synergies with Elionix equipment enables the developmnent of highly creative, mature and application-specific solutions for our customers in order that they meet their future market challenges.

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ELS Series

As the global leader in this technology we provide a selection of optimum systems from a wide lineup of products, including the world's most advanced ultra-high precision models.

-ELS Series-

ELS-F150
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150kV acceleration volatge EB Lithography
ELS-F125
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125kV acceleration volatge EB Lithography
ELS-F100
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100kV acceleration volatge EB Lithography
ELS-HS50
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50kV acceleration volatge EB Lithography
PAGETOP