About each model

Could you give us a demonstration?

Yes, we the latest models installed as demo machines in our head office showroom. Gladly we will provide demonstrations free of charge for potential customers. Our experienced staff will enable you to experience the peak-performance for each of the models firsthand. We also offer consultation on application cases. For more information, please contact the sales headquarters.

About ELS series

Which acceleration voltage is best for my needs?

The differences in acceleration voltage affect minimum processing dimensions, throughput, and price. Please contact us so that we can determine together the optimal accelerating voltage for your application.

What kind of environment can it be installed in?

A temperature and humidity-controlled environment is required. Additionally, we also have requirements for floor vibration, acoustic noise and magnetic field in order to unlock the highest performance. By conducting a preliminary survey of the installation environment, we can propose a suitable location and suggest mitigating countermeasures, like f.e. active Field Cancelling.

What format should the CAD be created in?

We natively support conversion from DXF or GDSII format. However, with the addition of GenIsys Beamer, all common CAD-formats or even bitmaps can be used. Advanced users can directly create exposure files with the help of our Python library.

Are there any restrictions on the samples that can be exposure?

For the best user exposure experience we recommend polished flat reflecting wafers. However, good results can also be achieved on insulating wafers like Quartz, curved substrates like lenses, not reflecting samples like poly-Si. Only restrictions are samples that cannot be handled in vacuum. Please contact us if you are considering exotic samples.

Please let me know the available sample size for exposure.

Depending on the equipment specifications, it is possible to handle wafers from 2 mm x 2 mm up to 300 mm. Please contact us if you are considering other sizes.

About ENT series

What test standards do you support?

ISO 14577 Part 1 (Instrumented indentation hardness test and material parameters Part 1: Test method)
JIS Z 2255 (Ultra-micro load hardness test method)
JIS Z 8844 (Measurement method of breaking strength and deformation strength of microparticles )

Can liquids (gels, etc.) be measured?

No unfortunately measurements are not possible on liquids.

How soft can it be measured?

It is possible to measure soft materials with a modulus of elasticity of about 3-4 MPa.

How to select measurement data?

A common method is to exclude some of the maximum and minimum analytical values and exclude areas outside one standard deviation of the. However, we also consider the variation of the data to be valuable information, so we recommend sample preparation (pre-treatment) in which all data can be utilized as much as possible.



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Business hours are from 8:30 to 17:30 on weekdays (Monday to Friday).