Product

Product Information

Electron Beam Lithography Systems

[New!] Electron Beam
   Lithography System
   [ELS-F150]

ELS-F150

Electron Beam
   Lithography System
   [ELS-F125]

ELS-F125

Electron Beam
   Lithography System
   [ELS-F100]

ELS-F100

Electron Beam
   Lithography System
   [ELS-HS50]

ELS-HS50

Measurement and Analysis Equipments

Surface Roughness
 
Analysis 3D SEM 
 
[ERA-9000]

3D Roughness Analyzer Scanning Electron Microscope [ERA-9000]

Surface Roughness
 Analysis 3D SEM 
 [ERA-600FE]

3D Roughness Analyzer Scanning Electron Microscope [ERA-600FE]

High-Resolution SEM
   Sample Coating
   System [ESC-101]
 

高分解能SEM用試料コーティング装置/スーパーファインコーター [ESC-101]

Topics

Topics
February 
2018
Exhibition
Exhibited at [nano tech 2018].
February 2018
New Products
Introduced [ELS-F150] Ultra High Precision Electron Beam Lithography System
February 
2017
Exhibition
Exhibited at [nano tech 2017].
January
2016
New Products
Introduced [ELS-HS50] High Throughput Electron Beam Lithography System
January 
2016
Exhibition
Exhibited at [nano tech 2016].
December 2015
Exhibition
Exhibited at the conference [SEMICON Japan 2015].
August 2015
New Products
Introduced [ERA-600]Surface Roughness Analysis 3D Scanning Electron Microscope.
September 2014
New Products
Introduced [ELS-S50], 50kV Electron Beam Lighography System.
August 2014
New Products
Introduced [ERA-600FE], Surface Roughness Analysis 3D Scanning Electron Microscope.
March
2014
Elionix was chosen and awarded as a [Global Nich Top Company Top 100] from the Minestry of Ministry of Economy, Trade and Industry.
January 2014
New Products
Introduced [ELS-F100], 100kV Electron Beam Lighography System.
PAGETOP