Product

Product Information

Electron Beam Lithography Systems

Electron Beam
   Lithography System
   [ELS-F150]

ELS-F150

Electron Beam
   Lithography System
   [ELS-F125]

ELS-F125

Electron Beam
   Lithography System
   [ELS-F100]

ELS-F100

Electron Beam
   Lithography System
   [ELS-HS50]

ELS-HS50

NEW Electron Beam
   Fabrication System
   [ELF-10000]

ELF-10000

Measurement and Analysis Equipments

Surface Roughness
 
Analysis 3D SEM 
 
[ERA-9000]

3D Roughness Analyzer Scanning Electron Microscope [ERA-9000]

Surface Roughness
 Analysis 3D SEM 
 [ERA-600FE]

3D Roughness Analyzer Scanning Electron Microscope [ERA-600FE]

High-Resolution SEM
   Sample Coating
   System [ESC-101]
 

高分解能SEM用試料コーティング装置/スーパーファインコーター [ESC-101]

Topics

Topics
January 
2020
Elionix was awarded the [Nano Fabrication Award] from the nano tech 2020 International Nanotechnology Exhibition & Cconference.
January
2020
New Products
Introduced [EIS-200DE] Compact Ion Shower system.
January
2020
New Products
Introduced [ELF-10000] Electron Beam Fabrication System.
January 
2020
Exhibition
Exhibited at [nano tech 2020].
September 
2019
Exhibition
Exhibited at [MNE2019].
May 
2019
Exhibition
Exhibited at [EIPBN2019].
January 
2019
Exhibition
Exhibited at [nano tech 2019].
February 
2018
Exhibition
Exhibited at [nano tech 2018].
February 2018
New Products
Introduced [ELS-F150] Ultra High Precision Electron Beam Lithography System.
February 
2017
Exhibition
Exhibited at [nano tech 2017].
January
2016
New Products
Introduced [ELS-HS50] High Throughput Electron Beam Lithography System.
January 
2016
Exhibition
Exhibited at [nano tech 2016].
December 2015
Exhibition
Exhibited at [SEMICON Japan 2015].
August 2015
New Products
Introduced [ERA-600]Surface Roughness Analysis 3D Scanning Electron Microscope.
September 2014
New Products
Introduced [ELS-S50], 50kV Electron Beam Lithography System.
August 2014
New Products
Introduced [ERA-600FE], Surface Roughness Analysis 3D Scanning Electron Microscope.
March
2014
Elionix was awarded the [Global Niche Top Company Top 100]  Award from the Ministry of Economy, Trade and Industry.
January 2014
New Products
Introduced [ELS-F100], 100kV Electron Beam Lighography System.
PAGETOP