Ion Beam Etching & Sputtering Systems

Ion Beam Etching Tools

Ultra Fine Processing by ECR Ion Beam

Compact and high performance capable of nanoscale etching.

Anisotropic Dry Etching by ECR Ion Beam

Nanoscale etching is possible over large areas.

Etching and Deposition with ECR Ion Beam

Equipped with two ion guns, a variety of processes can be consistently performed in a vacuum.