Electron Beam Lithography Systems

Research Tools

Unmatched Versatility in Nanofabrication

Acceleration voltages are available at 50, 100, 125, and 150 kV - selectable to match your application needs.

Precision within Reach

Cutting-edge performance on a customizable 30 kV platform tailored for R&D applications.

Production Tools

Speed That Matters

Low volume device fabrication with minimal line edge roughness.

Beyond What's Possible

Full 8-inch wafer size fabrications of nanoimprint molds within hours.

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