ELS-ORCA: A 30 kV Electron Beam Lithography System

Today, Elionix Inc. announced the launch of the new product called ELS-ORCA Electron Beam Lithography System.

ELS-ORCA is the latest entry model of electron beam lithography system for R&D. Various options for customization and user-friendly software "elms" are available. The retarding options enable low-damage/high-resolution SEM observation.