ELS-BODEN Σ
ELS-BODEN Σ
ELS-BODEN
ELS-BODEN
ENT-NEXUS
ENT-NEXUS

Product

Product Information

Nano Fabrication Systems

NEW Electron Beam
   Lithography System
   [ELS-BODEN Σ]

ELS-BODEN Σ

NEW Electron Beam
   Lithography System
   [ELS-BODEN]

ELS-BODEN

Electron Beam
   Lithography System
   [ELS-S50EX]

ELS-S50EX

Electron Beam
   Fabrication System
   [ELF-10000]

ELF-10000

ECR Ion Shower
   Etching System
   [EIS-1500]

EIS-1500

Compact ECR
   Ion Shower System
   [EIS-200DE]

EIS-200DE

Compact ECR
   Ion Shower System
   [EIS-200ERP]

EIS-200ERP

Measurement and Analysis Equipments

Surface Roughness
 Analysis 3D SEM 
 [ERA-9000]

ERA-9000

Surface Roughness
 Analysis 3D SEM 
 [ERA-600FE]

ERA-600FE

High-Resolution SEM
   Sample Coating
   System [ESC-101] 

ESC-101

Nanoindentation Tester
[ENT-NEXUS]

硬さ試験機/ナノインデンテーション [ENTシリーズ]

Topics

Topics
November
2020
New Products
Introduced [ELS-BODEN Σ] and [ELS-BODEN] Electron Beam Lithography System.
October
2020
ELIONIX INC. was selected as the [Companies Driving Regional Growth] by Ministry of Economy, Trade and Industry in Japan.
January 
2020
ELIONIX INC. was awarded the [Nano Fabrication Award] from the nano tech 2020 International Nanotechnology Exhibition & Cconference.
January
2020
New Products
Introduced [EIS-200DE] Compact Ion Shower system.
January
2020
New Products
Introduced [ELF-10000] Electron Beam Fabrication System.
January 
2020
Exhibition
Exhibited at [nano tech 2020].
September 
2019
Exhibition
Exhibited at [MNE2019].
May 
2019
Exhibition
Exhibited at [EIPBN2019].
January 
2019
Exhibition
Exhibited at [nano tech 2019].
February 
2018
Exhibition
Exhibited at [nano tech 2018].
February 2018
New Products
Introduced [ELS-F150] Ultra High Precision Electron Beam Lithography System.
February 
2017
Exhibition
Exhibited at [nano tech 2017].
January
2016
New Products
Introduced [ELS-HS50] High Throughput Electron Beam Lithography System.
January 
2016
Exhibition
Exhibited at [nano tech 2016].
December 2015
Exhibition
Exhibited at [SEMICON Japan 2015].
August 2015
New Products
Introduced [ERA-600]Surface Roughness Analysis 3D Scanning Electron Microscope.
September 2014
New Products
Introduced [ELS-S50], 50kV Electron Beam Lithography System.
August 2014
New Products
Introduced [ERA-600FE], Surface Roughness Analysis 3D Scanning Electron Microscope.
March
2014
Elionix was awarded the [Global Niche Top Company Top 100]  Award from the Ministry of Economy, Trade and Industry.
January 2014
New Products
Introduced [ELS-F100], 100kV Electron Beam Lighography System.
PAGETOP