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Acceleration Voltage 150 kV
Line & Space pattern with 50 nm
pitch and 3 nm line width
Elbow pattern with 12 nm pitch
Vertical, horizontal, diagonal, and ring patterns of 8 nm line
Bow-Tie pattern with 2.5 nm gap
Acceleration Voltage 125 kV
Line & Space pattern with 60 nm
pitch and 4 nm line
Blazed pattern with a pitch of
600 nm
SAW device pattern with 300 nm pitch
Triangle pattern of 50 nm per
side
Acceleration Voltage 100 kV
Line & Space pattern with 50 nm
pitch and 3 nm line
Line & Space patterns with 60 nm pitch
Square patterns with a pitch of 400 nm
Ring pattern with 50 nm line
Acceleration Voltage 50 kV
400 nm pitch Line & Space patterns on the entire surface of 4 inch wafer fabricated for 18 h
Concentric circle patterns with line
widths 100-450 nm
Patterns imitating scales of
morpho butterflies
Rectangular pattern with
150 nm line