Okinawa Institute of Science and Technology (OIST)
Electron Beam Lithography (EBL) System ELS-BODEN by ELIONIX was installed at Okinawa Institute of Science and Technology (OIST).
In this video, we interview a researcher who actually use the system and explore how ELS-BODEN contributes to cutting-edge nanofabrication and device development at OIST.
ELS-BODEN series is known for its high resolution, stability, and flexible workflow, making it a trusted EBL solution for university, nanofab facilities, and advanced research laboratories worldwide.
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ELIONIX Electron Beam Lithography SystemELS Series