ELS Series: Electron Beam Lithography System
OIST (Okinawa Institute of Science and Technology Graduate University)
Electron Beam Lithography (EBL) System ELS-BODEN by ELIONIX was installed at Okinawa Institute of Science and Technology (OIST).
In this video, we interview a researcher who actually use the system and explore how ELS-BODEN contributes to cutting-edge nanofabrication and device development at OIST.
ELS-BODEN series is known for its high resolution, stability, and flexible workflow, making it a trusted EBL solution for university, nanofab facilities, and advanced research laboratories worldwide.