ELS-HAYATE: Electron Beam Lithography System

Today, Elionix Inc. announced the launch of the new product called ELS-HAYATE Electron Beam Lithography System.

This is the latest model with the industry's fastest 400MHz scan clock and the industry's largest field size of 5mm batch drawing, high-current electron optical system with a maximum beam current of 800nA.

Furthermore, we will realize high-quality drawing with high throughput.