Case Studies
ELS Series Electron Beam Lithography System
University of Illinois at Urbana-Champaign
Holonyak Micro ＆ Nanotechnology Lab
The Holonyak Micro & Nanotechnology Lab (HMNTL) is one of the largest university-affiliated research facilities in the United States. The lab is named after Nick Holonyak, the inventor of the light-emitting diode. Here is a message from Edmond Chow, the lab’s chief engineer and a user of our equipment.
The Holonyak Micro & Nanotechnology Lab (HMNTL) is one of the largest university-affiliated research facilities in the United States. The lab is named after Nick Holonyak, the inventor of the light-emitting diode.
Okinawa Institute of Science and Technology Graduate University OIST
(Okinawa Institute of Science and Technology Graduate University)
The ELS-BODEN electron beam lithography system from ELIONIX has been installed at the Okinawa Institute of Science and Technology Graduate University (OIST).
In this video, we interview one of the researchers actively engaged in research at OIST to provide a detailed look at how the system is being utilized in the field of nanofabrication.
