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Electron Beam Lithography |
Nanoindentation | Ion Beam

Advanced Solutions
for Nanofabrication,
Measurement and
Analysis

Welcome to Elionix:
A Leading Provider of Nanotechnology Equipment for Research and Industry

Elionic's Microfabrication and Measurement/ Analysis Equipment

Who We Are

Elionix Provides Advanced Nanotechnology Solutions

For 50+ years, Elionix has made significant contributions to the field of nanofabrication, measurement, and analysis. From Electron Beam Lithography (EBL) systems to Nanoindentation Testers, Elionix has installed over 400 systems to research institutes and industrial customers worldwide.

What We Offer

Featured Products

Our portfolio includes electron beam lithography (EBL) systems, ion beam etching and sputtering systems, and nanoindentation testers, all designed to support leading-edge research.

Technology

We have compiled information on Elionix technology. Our content covers a wide range of topics, from beginner to advanced levels.
Technology

News

  • CategoryCorporate Website Has Been Renewed!

    Thank you for visiting the website of Elionix, Inc. From October 5, 2026, we have significantly renewed our website. We have redesigned and restructured our website with the aim of creating a website that is easier for users to see and use more comfortably. In addition, it supports display on smartphones and tablets, and has been improved so that it can be viewed from each device. In the future, we will continue to aim for a website that is even easier to use. Thank you for your continued support.

Contact Us

Feel free to get in touch. Our experts are happy to assist and answer your questions.