About Us

Elionix Delivers Advanced Solutions for Nanofabrication,
Measurement and Analysis

Elionix is a leading global provider of nanofabrication, measurement and analysis systems.
Staying true to the origins of our name - ELIONIX, derived from ELectron, ION, and X-rays (X) - we deliver advanced products that contribute to cutting-edge scientific and technological progress around the world.
Our portfolio includes electron beam lithography (EBL) systems, ion beam etching and sputtering systems, and nanoindentation testers, all designed to support leading-edge research.

The Three Strengths of Elionix

Unique Core Competences

Our core technologies lie in our design capabilities to focus electron beams to an extremely fine beam size and our advanced positioning technology. These enable microfabrication down to a minimum of 3 nanometers, fulfilling the exacting demands of cutting-edge research aimed at creating “the world’s smallest objects.”

Furthermore, as the only domestic manufacturer to produce nanoindentation testers (ultra-micro indentation hardness testers), we support the foundation of innovation through our unique technological capabilities.

User-centric Approach

No matter how high-performance a piece of equipment may be, it is useless if it cannot operate reliably in a research and development setting.

We have an in-house department dedicated to software design and utilize proprietary software developed with a focus on “ease of use.” This reduces the time required to learn how to operate the equipment and provides an environment where users can concentrate on their core objectives. Furthermore, to prevent even those unfamiliar with the equipment from accidentally causing errors, we have implemented a “safety-first design” controlled by the system, ensuring stable operation.

It is this cycle of listening closely to feedback from the field and incorporating it into product development and improvements that has made us the preferred choice for over half a century.

Service and Application Experts

"I can't achieve the desired results," or "I don't know how to take measurements." Our engineers, armed with extensive knowledge and experience, will work closely with you to provide thorough support in addressing these post-installation challenges. We also offer comprehensive support to help you master the equipment, including hands-on training, seminars, and study sessions.

For our international customers, we provide rapid response, such as resolving issues via remote access. Because our equipment is used around the world, we have established a comprehensive support system to ensure you can use it with confidence for many years to come.