3D Roughness Analysis Scanning Electron Microscope ERA-600SP

【To customers considering the ERA series】

Notice of Order Suspension

Thank you very much for your interest in our products. Due to an unexpectedly high volume of orders, we are currently unable to keep up with production and have therefore temporarily suspended the acceptance of new orders and requests for demo evaluations. We will provide an update on when we will resume these services as we monitor our production status. We sincerely apologize for any inconvenience this may cause and appreciate your understanding.

Extra-large non-destructive inspection system

ERA-600SP

Measurement and Analysis Equipment

Extra-large non-destructive inspection system with a maximum outer diameter of 400 mm

Key Features

Samples up to 400 mm in diameter can be mounted as-is,
enabling ultra-fine shape analysis using a high-resolution electron beam

Cylindrical specimens up to 400 mm in diameter can be mounted for observation of their sides (curved surfaces) and elemental analysis (optional).
By replacing the standard stage, standard high-magnification and 3D measurements are also possible.

Observation Stage (Example)

We can provide custom chamber and stage designs based on your sample’s shape and size.

Elemental analysis, crystal orientation analysis (optional)

Optional features such as elemental analysis and crystal orientation analysis can be added.
In addition to standard SEM images and morphological measurement data, a wide range of information—including elemental mapping images—can be obtained quickly.
The 3D elemental mapping function allows for the analysis of elemental height information on the nanometer to micrometer scale, enabling the detection of issues such as coating delamination and foreign element adhesion.

A wide range of options

We offer a variety of options. Please contact us for details.

Various sample holders
Navigation camera
Joystick
3D elemental mapping
Various coaters
Energy-dispersive X-ray spectrometer (EDS)
Electron backscatter diffraction (EBSP)

Large Sample Specifications

	High-Resolution System	Standard System
Resolution	1.2 nm(30 kV) 5 nm (1 kV)	3.5 nm(35 kV)
Electron Gun	ZrO/W Thermionic Field Emission Type	Pre-centered Tungsten
Acceleration voltage	0.3 ～ 30 kV	0.3 ～ 35 kV
Magnification	20 ～ 600,000Magnification	10 ～ 400,000Magnification
Magnification	(Practical magnification for large specimens: 2,000x)
Detector	Secondary electron detectors (4)
Image Analysis	Secondary electron image with difference signal texture enhancement, secondary electron image with sum signal composition enhancement, and standard secondary electron image
Image Format	BMP、JPG、TIFF、PNG
Maximum Sample Dimensions	Please contact us regarding sample sizes. (Sample examples: Φ400 mm, t=20 mm, etc.)
Maximum Sample Weight	15 kg (We can accommodate samples weighing more than 15 kg upon request)
Sample Travel Range	Depends on sample size. Example travel range: Y 400 mm, T 0–45° R 360° endless (motor-driven
Sample Exchange	Open-air type
Options	Sample chamber CCD camera Energy-dispersive X-ray analyzer Local low-vacuum mechanism

Disclaimer

The product information provided on this website describes the typical features and characteristics of the products; unless explicitly stated as specifications, it does not constitute a warranty of the products.
Please note that we assume no liability whatsoever for any damages resulting from the misuse or improper use of the products listed on this website. Additionally, product information is subject to change without notice. For the latest information, please contact our head office sales department. Please refrain from reproducing or reprinting the content posted on this website without permission.