3D Roughness Analysis Scanning Electron Microscope ERA-600 Series
【To customers considering the ERA series】
Notice of Order Suspension
Thank you very much for your interest in our products. Due to an unexpectedly high volume of orders, we are currently unable to keep up with production and have therefore temporarily suspended the acceptance of new orders and requests for demo evaluations. We will provide an update on when we will resume these services as we monitor our production status. We sincerely apologize for any inconvenience this may cause and appreciate your understanding.
3D Roughness Analysis Scanning Electron Microscope
ERA-600 Series
- Measurement and Analysis Equipment
We have completely redesigned the flagship model of the ERA series, capable of high-resolution SEM observation, nanometer-scale 3D surface
topography measurement, and roughness analysis
topography measurement, and roughness analysis
Key Features
Field-Emission Scanning Electron Microscope for Three-Dimensional Roughness Analysis
The definitive choice for high-precision, high-resolution surface profilometers.
This single instrument enables high-resolution SEM observation, surface profilometry, and the calculation of surface property parameters!
Recipient of the Japan Society for Precision Engineering Technical Award.
What can you do with the ERA series? What can you learn from it?
By removing compositional information, the image is reduced to a representation of topographical contrast alone.
Unlike standard SEM images, where topographical details are often ambiguous, this image allows for reliable determination of topographical features and enables precise shape measurement.
Various surface property parameters can be obtained
- You can obtain 3D bird's-eye-view images, contour maps, and surface texture parameters compliant with JIS and ISO standards.
- By linking these SEM images and 3D measurement data with Windows-compatible file server software, you can manage your data efficiently. This also significantly improves the efficiency of creating papers and reports.
3D bird's-eye view
Contour map
The world's only 3D imaging system equipped with four secondary electron detectors
Unlike standard SEM images, where topography is often ambiguous, this system provides a variety of information from the sample, including unique topography-enhanced secondary electron images that clearly reveal surface features, as well as secondary electron images that emphasize compositional contrast.
Additionally, options such as EDS, EBSD, and CL can be installed.
Additionally, options such as EDS, EBSD, and CL can be installed.
The image below shows the difference in appearance between the “composition-enhanced secondary electron image” on the left and the “topography-enhanced secondary electron image” on the right, both within the same field of view.
Composition-enhanced secondary electron image, magnification ×150
Topography-enhanced secondary electron image, magnification ×150
High resolution in both the vertical and horizontal directions
Thanks to our proprietary secondary electron signal processing technology, the system offers high resolution in both the vertical and horizontal directions, reliably capturing even the finest surface features.
High usability
- User-friendly Japanese menus and mouse-based operation.
- Equipped with an auto function for easy operation. In addition, the use of an integration unit provides clear, real-time still images, enabling observation and measurement even in brightly lit rooms.
Minimal damage to the sample
- Because the electronic probe scans the sample surface at high speed to take measurements, it does not damage the sample surface.
- The irradiation current is also extremely low, at 10 pA or less, allowing us to measure even samples that are susceptible to beam damage.
Easy to maintain
Because it is equipped with a proprietary long-life electron source (Schottky type), it requires virtually no routine maintenance.
3D Source Mapping with EDS Option Installed
Composition-enhanced secondary electron image, magnification ×2,000
Topography-enhanced secondary electron image, magnification ×2,000
EDS elemental mapping image of the same field of view
3D Elemental Mapping Image
Red: Ca, Blue: S, Green: Al
Red: Ca, Blue: S, Green: Al
Example of Expansion Panel + Joystick Installation
Example of EDS + EBSD Option Installation
Options
ENT-ERA (SEM, EBSD)
Coordinate-Sharing Holder System
This is a universal specimen holder compatible with the ERA series, the ENT-NEXUS ultra-micro indentation hardness tester, and the ENT series.
Both are instruments used for observing, analyzing, and evaluating the physical properties of specimen surfaces; by integrating them, you can obtain analytical results that significantly expand the capabilities of each individual instrument.
Both are instruments used for observing, analyzing, and evaluating the physical properties of specimen surfaces; by integrating them, you can obtain analytical results that significantly expand the capabilities of each individual instrument.
- This eliminates the need to remove and re-mount samples, enabling smooth sample transfer between instruments.
- Stage coordinate conversion between ERA Series, ENT-NEXUS, and ENT Series instruments is straightforward, allowing for the selection of the exact same field of view and measurement location in a matter of seconds.
Digital Surf's MountainsMap®
Topo Software
You can find more details about the optional software on the Digital Surf website.
Key Specifications
| ERA-600FE | ERA-600 | |
|---|---|---|
| Electron Gun | ZrO/W thermoelectric emission type | Precision tungsten |
| Accelerating Voltage | 0.3～30 kV | 0.3～35 kV |
| Lateral Resolution | 1.2 nm:30 kV 5 nm:1 kV |
3.5 nm:35 kV |
| Magnification | x20～600,000 Magnification | x10～400,000 Magnification |
| Sample Dimensions | Φ150 ×ｔ15 mm(max. diameter） Φ50 ×ｔ30 mm(max. thickness） |
|
| Sample Drive | 5-axis motor drive (X, Y, Z, R, T) | |
| Secondary Electron Detectors | 4 (a,b,c,d) | |
| Height Resolution | 1 nm | |
| Measurement Direction | X-direction, Y-direction | |
| Number of Measurement Data Points | 3D measurement data: max. 17.28 million points; 1-line measurement data: max. 32,767 points | |
| Surface Characteristics Parameter Calculation |
Bird's-eye view, contour lines, number of peaks, area fraction, grain size, surface area JIS Standard Parameters (Compliant with JIS B 0601-2001) |
|
| Options | Control panel, joystick, BSE detector, EDS, WDS, EBSD, preliminary evacuation chamber (4-inch type), navigation camera, various sample holders, Digital Surf Mountainsmap software— |
|
Download Related Materials
- Examples of Cutting Edge Evaluation of Precision Cutting Tools Using the ERA-600 and ERA-600FE
- Surface Topography Evaluation Technology Using Electron Beams Source: *Surface Technology* Vol. 57, No. 8, pp. 18–22
- Principles of the ERA-8900 and 8900FE
*The ERA-8900 and ERA-8900FE are the predecessor models of the ERA-600 and ERA-600FE, respectively.