August, 2015

Surface Roughness Analysis 3D Scanning Electron Microscope ERA-600 was announced.

imagePreviously, detector adjustment was required prior to measurement. We eliminated the need for this adjustment, allowing one-click 3D measurement and automatic multi-point measurement.

Nano-indentation tester (ENT series) and surface force analyzer (ESF-5000) share a common sample holder which simplifies locating measurement points and comparing measurements between systems.

*Nikkan Kogyo Shinbun Tuesday, 25th August, 2015 – page 10

August, 2014

Surface Roughness Analysis 3D Scanning Electron Microscope ERA-600FE was announced.

imageImproved usability allows simultaneous viewing of scanning electron microscope (SEM) and 3D measurement images. Additionally, automatic adjustment procedures ensure there is no user-generated measurement error.

Number of 3D measurement points increased to 17,280,000 pixels (16 times more than conventional systems), improving the precision of topographical information.

* Nikkan Kogyo Shinbun, Tuesday, 26th August, 2014

January, 2014

Ultra High Precision Electron Beam Lithography System ELS-F100 was announced.

imageMaximum beam current expanded to 100 nA (50 times conventional systems). Scanning speed shortened from 60 ns to 10 ns via 100 MHz clock.

*Nikkan Kogyo Shinbun, Friday, 24th January, 2014