Home > ERA-8900/ERA-8900FE

Electron Beam 3D Surface Roughness Analyzer

Field Emission Electron Beam 3D Surface Roughness Analyzer

ERA-8900 / ERA-8900FE

Awarded by the Japan Society for Precision Engineering.

Features

The world’s one and only system with the built-in four-channel secondary-electron detectors to provide 3D images.
  • Three types of high resolution images (topographic images (TOPO), compositional images (COMPO), and conventional SEM images) can be obtained.
  • Now available are the images without shadow at low magnification, the images with fine topographic details and images of the gradual waviness, which had previously been difficult to observe.

SE image with enhanced composition
:Mag x500

SE image with enhanced topography
:Mag x500

High resolution in both vertical and horizontal directions.
  • Our unique technology of secondary-electron signal processing gives high-resolution images in both vertical and horizontal directions, providing accurate capturing of fine surface profiles.
Various surface roughness data is available.
  • The surface roughness data is available in various forms, including 3D bird's eye view, contour map and histogram for analysis.
  • By linking these SEM images on the monitor screen and 3D measured data to Windows file server software, efficient data management is obtained, which will help enhance the efficiency of your thesis or report preparation.
Ease of operation
  • Easy-to-use menus and operation by using a mouse.
  • The built-in automatic functions enable easy operation of the system. Moreover, the integral unit employed in the system provides clear still images and enables observation and measurement in a bright room.
Minimal, if any, damage to specimens
  • High-speed scanning measurement by the electron probe eliminates the risk of specimen surface damages.
  • The beam current as low as 1pA enables measurement of samples sensitive to damages.
High maintainability
  • Our own-designed long-life electron source (schottky source) greatly eliminates the need for daily maintenance. The system also has a self-diagnosis function for the electron gun and power source.
    * For 8900FE only.

Specifications

  ERA-8900FE ERA-8900
Electron gun emitter ZrO/W thermal field emitter
(Schottky emitter)		 Tungsten
Maximum accelerating voltage 30kv 35kv
Resolution 1.2nm 3.5nm
Magnification 20x to 600,000x 10x to 300000x
Specimen size 152 φ x t15 mm (max. diameter),
50 φ x t30 mm (max. thickness)		 125 φ x t10 mm (max. diameter),
50 φ x t30 mm (max. thickness)
Work stage drive Five-axis (XYZRT) motor drive
Secondary electron detector Four-channel
Z-direction resolution 1 nm
Measurement direction X, Y
Number of measured data Approximately 1,000,000 maximum
Roughness analysis functions Bird's eye view, contour drawing, number of sections, area fraction, particle size, surface area, Ra, Rz, Rmax, etc.
Options EDS
  • Contact us

    • Home

    Back to top

    Products